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Plasma decomposition of ferrocene.

Pentti Niiranen¹, Felicia Andersson¹, Daniel Lundin¹

¹Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden.

The Journal of Chemical Physics

|January 15, 2025

Summary

Plasma decomposition of ferrocene (FeCp2) in plasma chemical vapor deposition (CVD) was studied. Ferrocene likely decomposes neutrally, detaching ligands and fragmenting into smaller molecules for iron film deposition.

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Area of Science:

Materials Science
Plasma Chemistry
Thin Film Deposition

Background:

Ferrocene (FeCp2) is a key precursor for iron-containing films via chemical vapor deposition (CVD).
Plasma-enhanced CVD lowers substrate temperatures, enabling deposition on sensitive materials.
Understanding precursor decomposition in plasma is crucial for process control.

Purpose of the Study:

To investigate the plasma decomposition pathways of ferrocene (FeCp2).
To develop a plasma chemical decomposition model for ferrocene under specific conditions.
To correlate experimental observations with theoretical modeling.

Main Methods:

In situ optical emission spectroscopy (OES) for plasma species analysis.
Quadrupole mass spectrometry (QMS) for detecting decomposition products.
In silico quantum chemical modeling for theoretical investigation.

Main Results:

Ferrocene (FeCp2) undergoes neutral decomposition in plasma CVD.
Detachment of cyclopentadienyl (Cp) ligands from the iron center is a primary step.
Fragmentation yields smaller molecules like C2, CH, H2, and H.

Conclusions:

A plasma chemical decomposition model for ferrocene under medium vacuum is proposed.
The model highlights neutral decomposition and ligand fragmentation as key pathways.
This research aids in optimizing plasma CVD processes for iron-containing films.