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Related Experiment Video

Updated: May 31, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation.

Md Kamrul Hasan¹, Mustaqim Siddi Que Iskhandar², Steffen Liebermann²

¹Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.

|January 25, 2025

Summary

Smart windows with MEMS micromirror arrays offer improved daylighting. New designs overcome angle limitations and enable 2D control, enhancing building energy efficiency and personalized lighting.

Keywords:

2D actuation daylight steering electrostatic actuation optical MEMS pull-in smart glass stress concentration

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Published on: September 25, 2020

Area of Science:

Materials Science
Mechanical Engineering
Optics

Background:

Millions of electrostatically actuated micromirror arrays are used in smart windows for building illumination and climatization.
MEMS smart windows offer significant energy reduction but face limitations in tuning angle and lack of orthogonal control.

Purpose of the Study:

To overcome limitations in MEMS smart window tuning angles and introduce a second orthogonal tuning angle for personalized light steering.
To improve daylight steering capabilities and energy efficiency in buildings.

Main Methods:

Utilizing tailored bottom electrode structures to enlarge the tilt angle (Φ) of electrostatically actuatable micromirror arrays.
Implementing 2D actuation for micromirror movement in tilt (Φ) and torsion (θ) angles using dual voltage control.
Modifying micromirror designs to prevent crack formation during 2D actuation.

Main Results:

Achieved considerably larger tuning ranges for micromirror tilt angles, significantly improving daylight steering.
Demonstrated 2D actuation with independent control of tilt and torsion angles.
Presented a solution to eliminate crack formation in metallic micromirror structures during free movement.

Conclusions:

The improved MEMS micromirror array designs enhance daylight steering and overcome previous limitations.
2D actuation provides greater flexibility for personalized light control in buildings.
The developed solutions contribute to more efficient and robust smart window technology.