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Updated: May 30, 2025

The Synthesis, Characterization and Reactivity of a Series of Ruthenium N-triphosPh Complexes
Published on: April 10, 2015
Heteroleptic "open ruthenocene" for deposition of Ru films from the gas phase
Roman Kultyshev1, Ian Harkness1, Daniel B G Berry1
1Johnson Matthew Technology Centre, Blounts Court Rd., Sonning Common, RG4 9NH, UK. roman.kultyshev@matthey.com.
Abstract:
A volatile heteroleptic open ruthenocene has been synthesised and characterised by NMR and single crystal X-ray diffraction. Using this compound as a precursor and oxygen as a co-reactant, a highly conductive Ru film has been deposited on Si with native oxide at 220 °C. Under the same deposition conditions, the film thickness obtained with the new compound has almost doubled compared to its homoleptic analogue.
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