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Updated: May 30, 2025

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces
Published on: June 7, 2019
High-efficiency three-port beam splitter under normal incidence
Abstract:
A fused-silica three-port grating under TE-polarized normal incidence is designed and manufactured with improved diffraction efficiency (DE) and bandwidth. A physical explanation of the grating diffraction is provided using the simplified mode method (SMM), and parameters of the grating structure were optimized using rigorous coupled-wave analysis (RCWA). For a given set of optimized parameters, a transmitted three-port grating with an area of 170m m×170m m was fabricated by scanning beam interference lithography (SBIL), and diffraction properties were investigated. The average DEs for the +1, 0, and 1 orders of the 25 sampling points are 29%, 30%, and 31% at a 632.8 nm incident wavelength. Additionally, the measured DEs of the +1, 0, and 1 orders all exceed 25% at the wavelength range from 613 to 653 nm.
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