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Updated: Jul 26, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A Spatiotemporal Tunable Filter Array Chip for Video-Rate Hyperspectral Imaging
Zijian Lin1,2,3, Tingbiao Guo1, Zhi Zhang1
1Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310058, People's Republic of China.
Abstract:
Existing miniaturized spectral imagers have mutual restrictions among spatial, temporal, and spectral resolutions, making them inadequate to meet practical needs. Here, we demonstrate a spatiotemporal filter array chip to tackle the trade-off among the three resolutions for miniaturized hyperspectral imaging. A 2 × 2 Fabry-Perot filter array is embedded inside a tunable liquid crystal spectral modulator, increasing the number of filtering channels spatiotemporally in hardware, which empowers the spectral imager with high spatial, temporal, and spectral resolutions simultaneously. The tunable filter is of transmission type with the advantages of easy fabrication and large modulation. Experimental results show the proposed spectral imager has a spectral resolution of around 0.5 nm in the visible range, with a frame rate of 60 Hz and a spatial resolution of up to 25 lp/mm without postinterpolation. The proposed filter gives the best balanced performance for spectral imaging in terms of spatial, temporal, and spectral resolutions.
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