Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project

Area of Science:

• Materials Science
• Nanotechnology
• Electrical Engineering

Background:

• Graphene's commercialization for electronic devices remains challenging 20 years after its discovery.
• The European Commission initiated the Experimental Pilot Line (2D-EPL) project to foster graphene and 2D materials-based device development.
• This project aims to establish a European pilot line for advanced electronic and optoelectronic applications.

Purpose of the Study:

• To report on the outcomes of the first and third multi-project wafer (MPW) runs conducted by the 2D-EPL project.
• To evaluate the quality and consistency of fabricated graphene-based devices.
• To validate the process design kit specifications through device testing.

Main Methods:

• Fabrication of electronic and optoelectronic devices based on graphene and related 2D materials using MPW runs.
• Comprehensive testing of fabricated devices across multiple wafers.
• Utilizing Raman spectroscopy to assess material integrity post-fabrication.
• Conducting electrical measurements to verify device performance against design specifications.

Main Results:

• Raman spectroscopy indicated negligible structural alterations in graphene during the fabrication process.
• Electrical measurements confirmed that two distinct device types met the predefined specifications in the process design kit.
• Device quality and variability were assessed across the wafers prior to customer delivery.

Conclusions:

• The 2D-EPL project successfully demonstrated the feasibility of producing high-quality graphene-based devices through its MPW runs.
• The results support the potential for scaling up graphene device manufacturing.
• The project is a significant step towards the commercialization of graphene and 2D materials in electronics and optoelectronics.