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Infrared spectroscopy is primarily used to determine the types of bonds and functional groups. In carboxylic acid derivatives, a typical carbonyl bond absorption is observed around 1650–1850 cm−1. For esters, the absorption is recorded at around 1740 cm−1, while acid halides show the absorption at about 1800 cm−1. Another acid derivative, the acid anhydrides, exhibit two carbonyl absorption around 1760 cm−1 and 1820 cm−1, arising from the symmetrical and...
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Interference leads to systematic error in atomic absorption (AA) measurements by enhancing or diminishing the analytical signal or the background. These interferences can be grouped into three main categories: spectral interference, chemical interference, and physical interference.
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For AAS measurements, samples must be introduced as clear solutions, often requiring extensive preliminary treatment to dissolve materials like soils, animal tissues, and minerals. Common methods for sample preparation include treatment with hot mineral acids, wet ashing, combustion in closed containers, high-temperature ashing, or fusion with reagents.
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When electromagnetic radiation passes through a material, atoms or molecules transition from a lower to a higher energy state by absorbing radiation corresponding to the energy difference between the two states. The absorption of infrared (IR) radiation causes transitions between vibrational energy levels in a molecule. Therefore, IR spectroscopy is a useful analytical tool for determining the molecular structure of molecules.
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Attenuated total reflectance (ATR) infrared spectroscopy is a powerful analytical technique used to study the composition of materials. It is widely employed in chemistry, materials science, forensic science, and other fields where sample characterization is required. ATR has several advantages over traditional transmission IR spectroscopy, including the requirement of little to no sample preparation and the ability to analyze a wide range of samples.
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Investigating Benzoic Acid Derivatives as Potential Atomic Layer Deposition Inhibitors Using Nanoscale Infrared

Saumya Satyarthy1, Mark Cheng2, Ayanjeet Ghosh1

  • 1Department of Chemistry and Biochemistry, The University of Alabama, Tuscaloosa, AL 35487, USA.

Nanomaterials (Basel, Switzerland)
|February 13, 2025
PubMed
Summary
This summary is machine-generated.

Small molecule carboxylates show promise as area-selective atomic layer deposition (AS-ALD) inhibitors. Fluorinated compounds offer superior blocking due to coordination chemistry, not hydrophobicity, impacting SAM structure during ALD growth.

Keywords:
atomic force microscopy-infrared spectroscopyatomic layer depositioncarboxylic acid inhibitorsself-assembled monolayerssurface chemistry and coordinationzinc oxide deposition

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Area of Science:

  • Materials Science
  • Surface Chemistry
  • Nanotechnology

Background:

  • Area-selective atomic layer deposition (AS-ALD) enables patterned thin film fabrication in semiconductors.
  • Self-assembled monolayers (SAMs) are crucial for inhibiting ALD growth in specific surface regions.
  • Limited understanding of SAM behavior under ALD conditions hinders inhibitor development.

Purpose of the Study:

  • To investigate small molecule carboxylates (benzoic acid, TBA, BTBA) as potential ALD inhibitors for AS-ALD.
  • To elucidate the role of molecular structure and interfacial chemistry in ALD inhibition.
  • To correlate SAM structural evolution with ALD growth for optimized inhibitor design.

Main Methods:

  • Fabrication and characterization of SAMs using benzoic acid and its fluorinated derivatives (TBA, BTBA).
  • Evaluation of SAMs as ALD blocking layers.
  • Utilized nanoscale infrared spectroscopy to probe the buried monolayer-SAM interface and coordination states.

Main Results:

  • All investigated carboxylates demonstrated viability as ALD blocking agents.
  • Fluorinated SAMs (TBA, BTBA) exhibited enhanced ALD inhibition compared to benzoic acid.
  • Coordination chemistry, not hydrophobicity, was identified as the key factor for improved inhibition.
  • Spectroscopic analysis revealed a correlation between carboxylate coordination states and ALD growth.

Conclusions:

  • Small molecule carboxylates are effective inhibitors for AS-ALD applications.
  • Interfacial coordination chemistry is critical for designing efficient ALD blocking layers.
  • Understanding SAM evolution under ALD conditions is essential for optimizing AS-ALD processes.