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Related Concept Videos

Measurement of Fluid Pressure01:16

Measurement of Fluid Pressure

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Fluid pressure is commonly measured using devices called manometers, which rely on liquid columns to indicate pressure differences. The height of a liquid column in a manometer reflects the pressure exerted by the fluid, providing a simple yet effective means of measurement. Different types of manometers serve specific purposes based on their configurations and the type of fluids involved.
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Most pressure gauges, like those on scuba tanks, are calibrated to read zero at atmospheric pressure. Readings from such gauges are called the gauge pressure, which is the pressure relative to atmospheric pressure. When the pressure inside the tank exceeds atmospheric pressure, the gauge reports a positive value. Some gauges are designed to measure negative pressure. For example, many physics experiments must take place in a vacuum chamber, a rigid chamber from which some of the air is pumped...
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In mechanical engineering, fluid pressure plays a critical role in designing systems that utilize liquid flow, such as hydraulic systems, pumps, and valves. When designing these systems, engineers must ensure they can withstand the forces created by fluid pressure to avoid damage or failure.
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Pressure Variation in a Fluid at Rest01:11

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In a fluid at rest, the pressure at any point beneath the fluid surface depends solely on the depth, not on the container's shape or size. This principle, known as hydrostatic pressure, arises because, in stationary fluids, there is no acceleration, meaning the forces within the fluid balance out. Only vertical forces, caused by the weight of the fluid above, contribute to pressure changes with depth.
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Gas pressure is caused by force exerted by gas molecules colliding with the surfaces of objects. Although the force of each collision is very small, any surface of an appreciable area experiences a large number of collisions in a short time, which can result in high pressure.
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Novel MEMS Multisensor Chip for Aerodynamic Pressure Measurements.

Žarko Lazić1, Milče M Smiljanić1, Dragan Tanasković1

  • 1Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia.

Sensors (Basel, Switzerland)
|February 13, 2025
PubMed
Summary
This summary is machine-generated.

Researchers developed a novel MEMS multisensor chip for aerodynamic testing. This integrated chip enhances pressure measurement accuracy and miniaturization for vehicles, aircraft, and structures.

Keywords:
MEMS multisensorchip fabricationpressure sensing

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Area of Science:

  • Aerospace Engineering
  • Mechanical Engineering
  • Materials Science

Background:

  • Multichannel pressure measurement instruments (pressure scanners) are crucial for aerodynamic testing of vehicles, aircraft, and structures.
  • Existing pressure scanners face limitations in miniaturization, channel density, and measurement performance.
  • Temperature sensors are often included for compensation, adding to bulk and complexity.

Purpose of the Study:

  • To develop and realize an innovative MEMS multisensor chip to overcome limitations of traditional pressure scanners.
  • To achieve higher pressure channel density per unit area through monolithic integration.
  • To improve sensor matching and thermal coupling for enhanced measurement performance.

Main Methods:

  • Preliminary and final chip design incorporating MEMS piezoresistive pressure sensors and resistive temperature sensors.
  • Numerical simulations to analyze the chip's mechanical behavior under pressure.
  • Fabrication processes including photolithography, deposition, micromachining, and anodic bonding.
  • Electrical testing for performance validation.

Main Results:

  • Successful monolithic integration of four MEMS pressure sensors and two temperature sensors on a single chip.
  • Demonstrated potential for high channel density and improved sensor matching and thermal coupling.
  • Development of a compact and high-performance solution for aerodynamic testing.

Conclusions:

  • The developed MEMS multisensor chip offers a significant advancement over conventional pressure scanners.
  • Monolithic integration enables miniaturization and improved performance for aerodynamic testing applications.
  • This innovative chip addresses the growing demands for high-density, high-performance pressure measurement.