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Published on: July 8, 2013
Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain
Haoran Zhao1,2, Qi Wang2, Jianyu Du2
1School of Engineering and Technology, China University of Geosciences (Beijing), Beijing 100083, China.
Abstract:
This paper presents a novel Ku-band parasitic patch antenna based on MEMS technology. The antenna consists of two substrates that are bonded together. The lower substrate houses the main patch and the ground layer, while the upper substrate supports the parasitic patch. To minimize the dielectric loss, the parasitic patch is fabricated using a double-layer suspended film process, combining parylene C and Spin-on-glass (SOG) materials. The two substrates are also bonded using SOG. The proposed antenna achieves a measured bandwidth of 30% (11.1~15.01 GHz), a peak gain of 8.57 dBi, and a compact size of 0.87 × 0.87 × 0.09 λ03.

