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Exploiting commercial micro X-ray fluorescence systems for stereoscopic soft X-ray imaging.

Ricardo Baettig1, Ben Ingram2, Ricardo A Cabeza3

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Commercial micro X-ray fluorescence (μXRF) systems can now create 3D chemical maps by exploiting beam misalignment for X-ray stereoscopy. This technique accurately reconstructs metal and void configurations in materials without system modification.

Keywords:
X-raysX-rays stereoscopic visionZ-backscatteringcompton scatter imagingmicro X-ray fluorescence

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Imaging Techniques

Background:

  • Commercial micro X-ray fluorescence (μXRF) systems often have beam misalignment, hindering spatial correlation.
  • This misalignment is usually seen as a disadvantage, limiting elemental information accuracy.

Purpose of the Study:

  • To demonstrate 3D configuration estimation of metals and voids in polymethyl methacrylate using commercial μXRF.
  • To explore enhancing μXRF mapping techniques for non-destructive 3D chemical analysis.

Main Methods:

  • Utilized unmodified commercial μXRF equipment for quantitative reconstruction.
  • Leveraged X-ray fluorescence (XRF) and Compton scattering effects.
  • Examined beam divergence impact on deeper object acutance.

Main Results:

  • Successfully reconstructed size, position, and depth of embedded tungsten, copper, and silver objects.
  • Depth estimation bias ranged from 4% to 15% for depths up to 24 mm.
  • Size estimation bias was below 3.2%.

Conclusions:

  • Demonstrated that μXRF beam inclination-induced misalignment can be used for 3D imaging.
  • Validated a robust methodology applicable to various samples with minimal μXRF system modifications.
  • Established a foundation for advancing μXRF mapping and interpretation for broader scientific applications.