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Updated: May 26, 2025

Fabrication and Testing of Photonic Thermometers
Published on: October 24, 2018
Theoretical Analysis of Efficient Thermo-Optic Switching on Si3N4 Waveguide Platform Using SiOC-Based
Dimitris V Bellas1,2,3, Eleftheria Lampadariou1,2,3, George Dabos1,2
1Department of Informatics, Aristotle University of Thessaloniki, 54124 Thessaloniki, Greece.
Optimized silicon nitride thermo-optic phase shifters achieve high efficiency for photonic integrated circuits. The asymmetric MZI with ring resonator design offers low power consumption and minimal losses, enabling scalable, energy-efficient photonic applications.
Area of Science:
- Photonics and Materials Science
- Integrated Optics and Photonics
- Nanophotonics and Plasmonics
Background:
- Photonic integrated circuits (PICs) are vital for telecommunications, quantum computing, and biomedical applications.
- Silicon nitride (SiN) platforms offer transparency, low optical loss, and thermal stability for PICs.
- Efficient thermo-optic (TO) modulation on SiN is hindered by reconfigurability limitations and high power demands.
Purpose of the Study:
- To optimize TO phase shifters on SiN platforms for improved power efficiency, reduced footprint, and minimized insertion losses.
- To develop a CMOS-compatible plasmo-photonic TO phase shifter.
- To evaluate different interferometer architectures for superior performance.
Main Methods:
- Opto-thermal simulations were employed to assess four interferometer architectures: symmetric and asymmetric Mach-Zehnder Interferometers (MZIs), an MZI with a ring resonator, and a single-arm design.
- A plasmo-photonic TO phase shifter utilizing a SiOC material layer with a high TO coefficient and aluminum heaters on a SiN platform was introduced.
- Performance metrics including power consumption, insertion loss, footprint, and switching speed were evaluated.
Main Results:
- The asymmetric MZI with ring resonator (A-MZI-RR) architecture exhibited the best performance.
- The A-MZI-RR demonstrated minimal power consumption (1.6 mW) and low insertion loss (2.8 dB).
- The optimized device achieved a reduced length of 14.4 μm, presenting a favorable figure of merit.
Conclusions:
- Optimized SiN-based TO switches offer enhanced efficiency and compactness.
- The developed plasmo-photonic TO phase shifter supports scalable and energy-efficient PICs.
- These advancements are crucial for high-performance photonic applications demanding reduced power and size.
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