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Updated: May 24, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures.

Datai Hui¹, Dongpeng Li¹, Binbin Wang¹

¹Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, 710072, Xi'an, China.

Microsystems & Nanoengineering

|March 2, 2025

Summary

This study introduces a new Microelectromechanical system (MEMS) grating modulator with a large aperture and high optical efficiency. The novel design overcomes limitations of previous MEMS modulators, enabling faster, more efficient optical communication.

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Area of Science:

Optoelectronics
MEMS devices
Nanophotonics

Background:

Microelectromechanical system (MEMS) grating modulators offer beam steering but face limitations in optical efficiency and aperture size.
Existing designs utilize movable ribbons, leading to fabrication complexities and cost issues compared to micromirror devices.

Purpose of the Study:

To develop a MEMS grating modulator with enhanced aperture scalability and high optical efficiency.
To address the limitations of conventional MEMS modulators for advanced optical applications.

Main Methods:

The study employs a tunable sinusoidal grating design with broadside-constrained continuous ribbons, moving away from end-constrained ribbons.
This approach facilitates improved scalability and an increased fill factor for the grating surface.

Main Results:

A MEMS grating modulator with a 30x30mm aperture and up to 90% optical efficiency was experimentally demonstrated.
The device achieved a 1.1μs mechanical settling time, >20dB extinction ratio, and >95% dynamic modulation contrast at 250kHz.
Broad wavelength modulation (635-1700nm) and a wide field of view (±30°) were achieved.

Conclusions:

The developed MEMS grating modulator offers significant improvements in aperture size and optical efficiency.
It shows strong potential for high-speed light attenuation and modulating retroreflector free-space optical (MRR-FSO) communication.
This technology paves the way for future high-speed, energy-efficient, and cost-effective communication networks.