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Updated: May 24, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Wei Zhou1,2,3, Xiong Wang2,3, Liwei Xue4
1College of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China.
High-precision micro-assembly of Micro-Electro-Mechanical Systems (MEMS) skin friction sensors is crucial for accurate hypersonic flow measurements. This study developed a system to control height errors, significantly improving sensor accuracy for aerodynamic research.
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