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Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding
Wenling Shang1,2, Danrui Wang1,2, Bin Miao1,2
1School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.
Micromachines
|March 6, 2025
Summary
This study introduces a reconfigurable piezoelectric micromachined ultrasonic transducer (PMUT) array using ScAlN thin film for improved in-air ranging. The novel design enhances frequency consistency, boosting environmental sensing capabilities.
Area of Science:
- Materials Science
- Electrical Engineering
- Acoustics
Background:
- Piezoelectric micromachined ultrasonic transducers (PMUTs) are valuable for environmental sensing due to their small size and low power consumption.
- Frequency inconsistency in PMUT arrays can cause directional errors in ultrasonic beams, limiting their application precision.
Purpose of the Study:
- To develop a reconfigurable PMUT array for enhanced in-air ranging capabilities.
- To address the challenge of frequency inconsistency in PMUT arrays through a novel design.
Main Methods:
- Fabrication of a reconfigurable PMUT array utilizing Scandium Aluminum Nitride (Sc$_{0.2}$Al$_{0.8}$N) piezoelectric thin film.
- Independent replacement of array elements to match desired frequency characteristics, improving device reusability.
- Experimental characterization of frequency uniformity, beam width, sound pressure output, reception sensitivity, and maximum sensing distance.
Main Results:
- Achieved a frequency uniformity of 0.38% for the 2 × 2 PMUT array.
- Measured a half-power beam width (θ -3dB) of 60° at 20 cm.
- Demonstrated a sound pressure output of 7.4 Pa (108.2 dB) at 69.7 kHz resonance and a reception sensitivity of 11.6 mV/Pa.
- Attained a maximum sensing distance of 7.9 m, extendable to 14.1 m with a horn, with a signal-to-noise ratio (SNR) of 19.5 dB.
Conclusions:
- The reconfigurable PMUT array effectively overcomes frequency inconsistency issues, enhancing directional accuracy.
- The proposed ScAlN-based PMUT array significantly expands ranging capabilities for environmental perception.
- This technology demonstrates high potential for advanced environmental sensing applications requiring precise ultrasonic ranging.
