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A 64 × 64 GaN Micro LED Monolithic Display Array: Fabrication and Light Crosstalk Analysis.

Yang Xiao1, Yuan Meng1, Xiaoyu Feng1

  • 1Tianjin Key Laboratory of Optoelectronic Detection Technology and System, School of Electronics and Information Engineering, Tiangong University, Tianjin 300387, China.

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Summary

Researchers developed a 64x64 GaN micro LED display to reduce light crosstalk. By etching photonic crystals, they confined light expansion, improving display definition for augmented reality (AR) applications.

Keywords:
focused ion beam (FIB)micro light-emitting diode (LED)monolithic display arrayoptical crosstalkphotonic crystal

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Area of Science:

  • Optoelectronics
  • Materials Science
  • Nanotechnology

Background:

  • Monolithic micro LED display arrays are promising for augmented reality (AR) devices.
  • Optical crosstalk between adjacent micro LEDs reduces display definition due to short pixel distances.
  • Existing micro LED fabrication methods require optimization to mitigate crosstalk.

Purpose of the Study:

  • To fabricate a monolithic 64x64 Gallium Nitride (GaN) micro LED display array.
  • To suppress optical crosstalk between adjacent micro LEDs.
  • To enhance the display definition of micro LED arrays.

Main Methods:

  • Fabrication of a 64x64 GaN micro LED array on a silicon-based drive circuit (20 μm x 20 μm pixels, 28 μm pitch).
  • Etching of a photonic crystal structure on the micro LED sapphire substrate using focused ion beam (FIB).
  • Analysis using near-field electroluminescence (EL) measurements and finite element method (FEM) calculations.

Main Results:

  • Successfully fabricated a monolithic GaN micro LED display array.
  • Demonstrated effective suppression of optical crosstalk using etched photonic crystals.
  • Confirmed light expansion confinement within the photonic crystal micro LEDs with thinner substrates via EL and FEM.

Conclusions:

  • Photonic crystal structures effectively control optical crosstalk in monolithic micro LED arrays.
  • The developed fabrication technique offers a viable solution for high-definition micro LED displays.
  • This work provides valuable insights for future micro LED display advancements, particularly for AR applications.