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Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 2nd Edition
Yao-Chuan Tsai1, Pin-Chun Huang2, Ching-Liang Dai3
1Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan.
Micromachines
|March 6, 2025
Abstract:
Microelectromechanical systems (MEMSs) and nanoelectromechanical systems (NEMSs) are revolutionary technologies that merge mechanical and electronic components on microscopic and nanoscopic scales [...].
