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Updated: May 21, 2025

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Yichao Wang1, Xi Li1, Chuanxin Ge1
1School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, China.
Researchers developed a novel method to enhance gas sensors. Modifying tungsten oxide (WO3) films with amorphous carbon improves nitrogen dioxide (NO2) detection and humidity resistance, paving the way for high-performance sensors.
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