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Updated: May 15, 2025

Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
Published on: November 28, 2017
Strain-Assisted Large-Scale 1T-MoS2 Synthesis and its Optical Synaptic Flash Memory Application
Hyelim Shin1, Gunhoo Woo2, Jinill Cho3
1Department of Semiconductor Convergence Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea.
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2D transition-metal dichalcogenides (TMDCs) have attracted attention as promising materials for next-generation devices owing to their versatile electronic and optical properties. The phase variety of TMDCs provides strategic opportunities for performance enhancement. Herein, a novel method is proposed to synthesize wafer-scale 1T phase MoS₂ and, simultaneously, induce a phase transition via a plasma-assisted metal-sulfidation process and spontaneous internal strain. With thicker MoS2 layers, the strong internal strain during synthesis suppresses the undesirable phase transition from the metastable 1T phase to the 2H phase, ensuring stabilization of the 1T phase. Furthermore, as-synthesized 1T-MoS₂ shows remarkable electrical properties owing to the narrow bandgap (0.4 eV) of its semi-metallic state. As a result, the 1T-phase MoS₂ floating gate (1T-FG) flash memory demonstrates a wider memory window, a higher on/off ratio, and improved stability compared to the 2H-phase MoS₂ floating gate (2H-FG) flash memory. A 5 × 5 array structure is constructed to validate large-scale integration. Notably, under light irradiation, a single 1T-FG memory enables carrier trapping in the floating gate, even in the off state. This study introduces a facile phase control strategy and provides insights into advanced nonvolatile memory and optoelectronic synaptic functionalities.

