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Updated: May 15, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Atomic-Scale Insights into the 2D Materials from Aberration-Corrected Scanning Transmission Electron Microscopy:
Woonbae Sohn1, Miyoung Kim1, Ho Won Jang1,2
1Department of Materials Science and Engineering Research Institute of Advanced Materials Seoul National University Seoul 08826 Republic of Korea.
Abstract:
2D crystals are attractive due to their unique atomic, electronic structures, and physiochemical properties, which strongly rely on the synthesis conditions. The atomic structure and presence of defects in the crystal lattice, such as vacancies, dopants, grain boundaries, and edge terminations, significantly influence the properties of 2D materials. Due to its high spatial resolution, aberration-corrected scanning transmission electron microscopy (AC-STEM) has become a powerful tool to provide atomic-scale insights into the crystal structure, defects, heterointerfaces, ferroelectricity, and in situ observations of 2D materials. This review will cover the status of atomic-scale studies on various 2D materials, including graphene, boron nitride, transition metal dichaogenides, MXenes, and phosphorene using AC-STEM. The future perspective of AC-STEM for new findings in 2D materials using machine learning is further discussed.
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