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Computationally efficient multi-layer thickness determination using sparse CW THz spectroscopy.

Alexander Jäckel, Cornelius Mach, Lauri Schwenson

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    Summary
    This summary is machine-generated.

    This study demonstrates a novel sparse sampling method for continuous wave terahertz spectroscopy, enabling kHz acquisition rates for real-time industrial thickness measurements with high accuracy.

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    Area of Science:

    • Physics
    • Spectroscopy
    • Materials Science

    Background:

    • Continuous wave (CW) terahertz spectroscopy is vital for industrial non-destructive testing and multi-layer thickness determination.
    • Real-time inline monitoring necessitates high acquisition and data evaluation rates, often hindered by full spectrum analysis.
    • kHz acquisition rates require optimized data processing beyond traditional full spectral scans.

    Purpose of the Study:

    • To demonstrate the feasibility of extracting multi-layer thicknesses from sparsely sampled terahertz spectra.
    • To develop a real-time evaluation scheme for high-speed (kHz) terahertz spectroscopy applications.
    • To validate a computational reduction strategy for terahertz spectroscopic data analysis.

    Main Methods:

    • Implemented a sparse sampling approach, analyzing only selected frequencies instead of a full spectrum.
    • Developed a real-time evaluation scheme with computational runtimes under one millisecond.
    • Utilized knowledge of sample composition and refractive indices for layer thickness extraction.

    Main Results:

    • Achieved multi-layer thickness determination with uncertainties comparable to full spectrum evaluation.
    • Reduced computational load by three orders of magnitude for data analysis.
    • Demonstrated a standard deviation below 5 µm for individual layer thicknesses in a three-layer sample.

    Conclusions:

    • Sparse sampling in terahertz spectroscopy is effective for high-speed industrial applications.
    • The developed real-time evaluation scheme enables kHz measurement rates for inline monitoring.
    • This approach addresses industrial needs for rapid, accurate multi-layer thickness determination.