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Heterogeneous integration, single-mode MEMS-VCSEL with super-span resonance filtering, small divergence angle, and
Optics Express
|April 12, 2025
Summary
We developed a new tunable laser for WDM-PONs. This device achieves stable single-mode emission over a wide wavelength range with excellent beam quality, showing promise for optical networks.
Area of Science:
- Optoelectronics
- Photonics
- Materials Science
Background:
- Vertical cavity surface emitting lasers (VCSELs) are crucial for wavelength-division multiplexing passive optical networks (WDM-PON).
- Existing VCSEL designs struggle with stable single-mode emission and beam quality across tunable ranges.
- Limitations in laser beam quality hinder widespread adoption in advanced optical communication systems.
Purpose of the Study:
- To design and fabricate a novel heterogeneous integration (HI) micro-electro-mechanical system (MEMS) tunable VCSEL.
- To achieve continuous wavelength tuning with stable single-mode operation and high beam quality.
- To demonstrate the potential of this device for WDM-PON applications.
Main Methods:
- Fabrication of an electrically pumped 1060 nm heterogeneous integration (HI) super-span resonance filtering micro-electro-mechanical system (MEMS) tunable VCSEL.
- Characterization of wavelength tuning range, mode stability, and beam quality (Gaussian distribution, divergence angle).
- Experimental verification of single-mode laser operation across the entire tuning spectrum.
Main Results:
- Achieved a continuous wavelength tuning range of 34.41 nm at room temperature.
- Demonstrated stable single-mode laser operation across the entire tuning range.
- Observed an almost ideal Gaussian beam profile with a minimum divergence angle of 8.65° for the linear polarization mode.
Conclusions:
- The developed single-mode HI MEMS-VCSEL exhibits high beam quality and wide continuous tuning.
- This technology shows significant potential as a light source for WDM-PON.
- The findings open new avenues for advanced optical communication and other photonic applications.

