High-performance tunable spatial light modulator based on a lead zirconate titanate thin film

A dynamically tunable spatial light modulator (SLM) that leverages the electro-optic effect typically exhibits faster response times and higher operating frequencies, making it highly suitable for optical communication applications. However, existing spatial electro-optic modulators often suffer from limited phase modulation capabilities and complex, costly fabrication processes. To overcome these limitations, this paper introduces what we believe to be a novel SLM design utilizing a lead zirconate titanate (PZT) film. This material is characterized by a high electro-optical coefficient and broad optical transmittance range. Experimental results show that the SLM achieves a phase shift of approximately 5 nm at 5 V, with a reflectivity of 85%. When driven by ±10 V, the modulator's amplitude modulation reaches 0.72%, and the modulation depth reaches 69.85%, operating within a wavelength range of 1500-1600 nm and a bandwidth of 364 MHz. This approach offers a new, to the best of our knowledge, and cost-effective solution for realizing tunable SLMs with high modulation capacity.