Modulation of Nanowire Emitter Arrays Using Micro-LED Technology

A scalable excitation platform for nanophotonic emitters using individually addressable micro-LED-on-CMOS arrays is presented. Heterogeneous integration by transfer printing of semiconductor nanowires was used for the deterministic assembly of the infrared emitters embedded in polymer optical waveguides with a high yield and positional accuracy. Direct optical pumping of these emitters is demonstrated using micro-LED pixels as a source, with optical modulation (on-off keying) measured up to 150 MHz. A micro-LED-on-CMOS array of pump sources was employed to demonstrate individual control of multiple waveguide-coupled nanowire emitters in parallel, enabling future large-scale photonic integrated circuit applications.