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On-Chip Array Fluorescent Sensor for High-Sensitivity Multi-Gas Detection.

Yaorong Xiahou^1,2,3, Bo Wang^4,5, He Li^4,5

¹School of Microelectronics, Shanghai University, Shangda Road 99, Shanghai 200444, China.

|April 25, 2025

Summary

This summary is machine-generated.

This study introduces a miniaturized fluorescent gas sensor array on a silicon nitride photonic chip. The compact device offers high sensitivity and accuracy for detecting volatile organic compounds, enabling lab-on-chip gas sensing applications.

Keywords:

array fluorescence gas detection photonic integration sensor

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Area of Science:

Photonics
Chemical Sensing
Materials Science

Background:

Fluorescence array sensors offer high sensitivity but often suffer from complex, bulky designs, limiting miniaturization and cost-effectiveness.
Photonic integration technology presents a viable solution for developing low-cost, miniaturized sensor arrays due to its high integration capabilities.

Purpose of the Study:

To develop a novel, miniaturized fluorescence array sensor utilizing silicon nitride photonic integration.
To achieve lab-on-chip functionality for efficient gas detection with enhanced sensitivity and reduced cross-reactivity.

Main Methods:

Fabrication of a fluorescence array sensor on a silicon nitride photonic integration platform.
Integration of a microfluidic channel for streamlined gas sample delivery and detection.
Utilizing high dimensionality and sensitivity of fluorescence arrays for volatile organic compound (VOC) identification.

Main Results:

The sensor accurately identified six types of volatile organic compounds (VOCs).
Achieved a low detection limit of 2.8 ppb for N-methylphenethylamine (MPEA).
Demonstrated high precision in detecting MPEA within complex perfume mixtures, showcasing robustness.

Conclusions:

The silicon nitride photonic integration platform enables the development of compact, cost-effective, and highly sensitive fluorescence array gas sensors.
This technology facilitates lab-on-chip gas detection and allows for array expansion without increasing sensor volume.
The developed sensor shows significant potential for integrated, miniaturized gas sensing applications with improved performance.