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Updated: May 10, 2025

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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
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Recent Research on Structural Design, Performance Optimization, and Applications of Piezoelectric Pumps
Qiufeng Yan1,2, Zhiling Liu3, Le Wang4
1School of Electrical Engineering and Automation, Nantong University, Nantong 226019, China.
Micromachines
|April 26, 2025
Summary
This review categorizes piezoelectric pumps (PPs) into valve-less, valve-based, and transitional types, analyzing their designs and performance. It also covers optimization strategies and applications for PPs.
Area of Science:
- Mechanical Engineering
- Materials Science
- Fluid Dynamics
Background:
- Piezoelectric pumps (PPs) offer advantages like low power consumption and fast response, finding use in chip cooling, biomedical, chemical, and fuel applications.
- Recent decades have seen significant research into various PP designs and their performance characteristics.
Purpose of the Study:
- To review and categorize recent advancements in piezoelectric pump (PP) research.
- To analyze the design, performance, advantages, and disadvantages of different PP types.
- To summarize optimization methods and discuss current applications and future research directions for PPs.
Main Methods:
- Classification of PPs based on valve structure: valve-less (VLPPs), valve-based (VBPPs), and transitional (PPVVSTs).
- Comparative analysis of typical structures, driving parameters, output performance, materials, and size for single-chamber (SCPs) and multi-chamber (MCPs) PPs.
- Review of optimization techniques for issues like cavitation and back-flow, alongside application research.
Main Results:
- VLPPs, VBPPs, and PPVVSTs exhibit distinct advantages and disadvantages regarding driving frequency, voltage, pressure, and flow rate.
- SCPs and MCPs differ in driving parameters, output performance, materials, and size, with specific pros and cons for each.
- Optimization methods have been developed to address cavitation, liquid back-flow, and enhance overall PP performance.
Conclusions:
- This review provides a comprehensive understanding of PP structural design, optimization, and applications.
- It offers theoretical guidance for researchers by highlighting current research distribution and future hot spots in piezoelectric pump technology.
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