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Updated: May 5, 2026

Experiments on Ultrasonic Lubrication Using a Piezoelectrically-assisted Tribometer and Optical Profilometer
Published on: September 28, 2015
Advances in Linear Ultrasonic Motors
Zhiling Liu1, Qiufeng Yan2,3, Qingyu Liu4
1Graduate School of Education, Joongbu University, Goyang 10279, Republic of Korea.
Abstract:
Linear ultrasonic motors (LUSMs) occupy an important position in the field of high-precision actuation due to their advantages of simple structure, high control accuracy and direct linear motion generation. This review first classifies LUSMs according to wave modes into traveling wave linear ultrasonic motors (TWLUSMs) and standing wave linear ultrasonic motors (SWLUSMs). Among them, TWLUSMs include the straight beam type and the annular beam type, while SWLUSMs consist of the single-foot type and the multi-foot type. In addition, the working principles of TWLUSMs and SWLUSMs are elaborated. The structural characteristics and performance parameters of different types of ultrasonic motors (USMs) are sorted out, and the analysis shows that SWLUSMs are significantly superior to TWLUSMs in terms of output speed and output force. This review summarizes the application status of LUSMs in fields such as biomedicine, deep-sea exploration, aerospace and precision manufacturing, and finally outlines the development trends of LUSMs from the aspects of miniaturization and lightweighting, extreme environment adaptability and intelligent upgrade. This review provides a comprehensive reference for the structural design, performance improvement and application expansion of LUSMs.
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