Electro-mechanical Systems
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Rana Abdelrahman1,2, Alaaeldin Elhady1, Yasser S Shama1,2,3
1Systems Design Engineering, University of Waterloo, 200 University Ave. W, Waterloo, ON N2L 3G1, Canada.
Resonant circuits significantly boost voltage for microelectromechanical systems (MEMS) actuation. These methods outperform traditional voltage amplifiers, especially at high frequencies, enabling better MEMS device performance.
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