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Updated: May 15, 2025

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Threshold Voltage Control through Solvent Doping of Monolayer MoS2 Transistors
Kathryn Neilson1,2, Charles Mokhtarzadeh1, Marc Jaikissoon1
1Technology Research, Intel Corporation, Hillsboro, Oregon 97124, United States.
Solvent polarity controllably n-dopes monolayer molybdenum disulfide (MoS2) transistors, tuning threshold voltage (VT) and improving performance. This method enhances on-current and reduces contact resistance without degrading switching behavior.
Area of Science:
- Materials Science
- Nanotechnology
- Solid State Physics
Background:
- Two-dimensional (2D) materials offer potential for next-generation electronics due to their atomic thinness.
- Doping 2D materials is crucial for high-performance logic devices, enabling tunable threshold voltage (VT).
- Achieving controlled doping in 2D materials without compromising device characteristics remains a significant challenge.
Purpose of the Study:
- To investigate the n-doping of monolayer molybdenum disulfide (MoS2) using solvents of varying polarity.
- To enhance transistor performance and understand the impact of solvent polarity on threshold voltage (VT).
- To explore solvent doping as a method for tuning carrier concentration and contact resistance in 2D devices.
Main Methods:
- Monolayer MoS2 field-effect transistors were fabricated.
- Exposure to solvents with different polarities was used for n-doping.
- Electrical characteristics, including threshold voltage (VT), on-current, and subthreshold swing, were measured.
- Schottky barrier width and contact resistance were analyzed.
Main Results:
- Solvent polarity predictably shifts the threshold voltage (VT) of MoS2 transistors.
- N-doping via solvents enhances the maximum on-current and reduces contact resistance.
- The doping process did not significantly degrade the subthreshold swing, preserving switching behavior.
- Solvent doping was found to reduce the Schottky barrier width.
Conclusions:
- Solvent polarity offers a controllable method for n-doping 2D materials like MoS2.
- This approach enables tuning of carrier concentration and threshold voltage (VT) for improved transistor performance.
- Solvent processing provides a pathway for optimizing contact resistance and advancing 2D electronic devices.
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