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Nanosheets Derived from Titanium Diboride as Gate Insulators for Atomically Thin Transistors.

Anshul Rasyotra1,2, Mayukh Das1, Dipanjan Sen1

  • 1Engineering Science and Mechanics, Penn State University, University Park 16802, United States.

ACS Nano
|May 19, 2025
PubMed
Summary

Titanium diboride nanosheets offer a low equivalent oxide thickness (EOT) for advanced transistors. These novel gate insulators improve performance and reduce power in molybdenum disulfide field-effect transistors (MoS2 FETs).

Keywords:
2D materialsdielectricdissolution-recrystallizationfield-effect transistormetal diboridessubthreshold swing

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Microelectronics

Background:

  • Advancing transistor technology requires gate insulators with low equivalent oxide thickness (EOT) and reduced gate leakage.
  • Thicker physical layers with low EOT are crucial for minimizing static power dissipation without compromising transistor performance.

Purpose of the Study:

  • To investigate titanium diboride (TiB2) derived nanosheets as gate insulators for monolayer molybdenum disulfide field-effect transistors (MoS2 FETs).
  • To evaluate the electrical characteristics, thermal stability, and endurance of TiB2 nanosheet-gated MoS2 FETs.

Main Methods:

  • Synthesis of titanium diboride derived nanosheets (NDTD) at room temperature via a scalable dissolution-recrystallization method.
  • Integration of NDTD as top gate dielectrics for monolayer MoS2 FETs.
  • Characterization of device performance, including equivalent oxide thickness (EOT), subthreshold swing, gate leakage current, on/off ratio, thermal stability, and switching endurance.

Main Results:

  • NDTD exhibited an EOT of approximately 2 nm, independent of physical thickness, for MoS2 FETs.
  • Devices showed a near-ideal subthreshold swing (60 mV/decade), low gate leakage (<10-4 A/cm2), and high current on/off ratio (106).
  • TiB2 nanosheet-gated MoS2 FETs demonstrated stable operation at 125 °C and switching endurance exceeding 109 cycles.

Conclusions:

  • Titanium diboride derived nanosheets are effective gate insulators for advanced microelectronic applications.
  • These nanosheets enable excellent electrostatic control and reliability in MoS2 FETs.
  • The study highlights the potential of metal diboride nanosheets beyond traditional applications, particularly in next-generation transistors.