[CON3H6BF4]: An Efficient Metal-Free Borate with Optimized Birefringence Achieved by Structural Design Strategy

Muhammad Arif1,2, Xu Liu1, Hangwei Jia1

  • 1Research Center for Crystal Materials, CAS Key Laboratory of Functional Materials and Devices for Special Environmental Conditions, Xinjiang Key Laboratory of Functional Crystal Materials, Xinjiang Technical Institute of Physics and Chemistry, CAS, 40-1 South Beijing Road, Urumqi, 830011, China.

Summary

Researchers developed a new deep-ultraviolet (UV) birefringent material, AUBF, for advanced lithography. This novel urea-based compound exhibits excellent optical anisotropy and performance, crucial for deep-UV applications.

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