Solid-state nanopore conductance modulation using integrated microheaters

A precise localised temperature control in solid-state nanopores can provide additional control for applications in biosensing and single-molecule manipulation. Here, we demonstrate on-demand localised heating using a microheater integrated solid-state nanopore fabricated on a 30 nm thick silicon nitride membrane. The microheater integrated nanopore exhibited stability across multiple environments, including air, liquid, and vacuum. Finite element simulations and a thermal lumped model were used to predict device behaviour, and was corroborated by experimental measurements on the fabricated device. Thermal characterisation and failure mode analyses revealed its operational boundaries. Using this device design, we were able to tune the conductance of the nanopore with a conductance tunability of 2.5 nS V^-1. As an example, we could increase the conductivity of 0.01 M KCl solution from 0.46 nS to 0.71 nS by applying a 0.2 V input to the microheater. This work lays a foundation for future applications, such as microheater integration in liquid TEM for nanopores, with broad implications for nanofluidics and single-molecule sensing technologies.