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MOS Capacitor

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A method for fabricating CMOS back-end-of-line-compatible solid-state nanopore devices.

Mohamed Yassine Mbouh Uottawa Ca Bouhamidi¹, Chunhui Dai², Michel Stephan¹

¹Department of Physics, University of Ottawa, Ottawa, Ontario, Canada.

|June 18, 2025

Summary

This summary is machine-generated.

Researchers developed new, low-temperature methods to create silicon nitride (SiNₓ) membranes for solid-state nanopores (ssNPs). These compatible techniques enable on-chip integration for advanced single-molecule sensing and data storage applications.

Keywords:

BEOL CMOS molecular information storage nanopore single-molecule sensors solid-state

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Area of Science:

Materials Science
Nanotechnology
Biophysics

Background:

Solid-state nanopores (ssNPs) are powerful nanoscale sensors for single-molecule analysis.
ssNPs offer potential for molecular information storage due to their high resolution.
Integrating ssNPs with on-chip electronics requires compatible fabrication methods.

Purpose of the Study:

To explore and validate lower-temperature, back-end-of-line (BEOL) compatible deposition techniques for silicon nitride (SiNₓ) membranes.
To enable the fabrication of ssNPs suitable for on-chip integration and high-throughput data processing.
To maintain high signal-to-noise ratios for sensitive single-molecule detection.

Main Methods:

Investigated alternative, lower-temperature deposition methods for SiNₓ membrane fabrication.
Fabricated ssNPs using these BEOL-compatible techniques.
Characterized the physical, chemical, and electrical properties of the resulting membranes and nanopores.
Performed single-molecule experiments to assess nanopore performance.

Main Results:

Successfully demonstrated the feasibility of lower-temperature SiNₓ deposition techniques.
Generated low-noise ssNPs using these alternative fabrication methods.
Confirmed the capability of these ssNPs to perform single-molecule experiments.

Conclusions:

Lower-temperature, BEOL-compatible deposition methods are viable for producing high-quality SiNₓ membranes for ssNPs.
These advancements pave the way for integrating ssNP sensors with semiconductor electronics for on-chip solutions.
The developed techniques support the advancement of molecular information storage and advanced biosensing platforms.