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Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
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Quantitative Electron Beam-Single Atom Interactions Enabled by Sub-20-pm Precision Targeting.

Kevin M Roccapriore1, Frances M Ross2, Julian Klein2

  • 1Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA.

Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
|June 25, 2025
PubMed
Summary
This summary is machine-generated.

A new "atomic lock-on" technique precisely positions electron beams for single-atom analysis, enabling unprecedented control and measurement of matter at the picometer scale for quantum technologies.

Keywords:
2D materialsatomic manipulationelectron beam positioningelectron microscopyspectroscopy

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Area of Science:

  • Materials Science
  • Quantum Technology
  • Electron Microscopy

Background:

  • Picometer-scale control of matter is crucial for quantum and energy technologies.
  • Scanning transmission electron microscopy (STEM) has limitations like sample damage and drift for single-atom analysis.

Purpose of the Study:

  • To develop a precise electron beam positioning technique for atomic-level analysis and manipulation.
  • To overcome limitations of current electron microscopy methods for deterministic control of matter.

Main Methods:

  • Developed a fast, low-dose, sub-20-pm precision electron beam positioning technique called "atomic lock-on" (ALO).
  • Utilized ALO to lock onto specific atomic locations for repeated measurements despite sample drift.
  • Measured electron beam-matter interactions at microsecond resolution.

Main Results:

  • Achieved sub-20-pm precision electron beam positioning without prior irradiation.
  • Successfully performed repeated measurements of atomic signals in the presence of sample drift.
  • Observed single-atom dynamics, including atomic bistability and recapture phenomena.

Conclusions:

  • The ALO technique enables precise, low-dose electron beam control at the atomic scale.
  • This method facilitates high-precision measurements and deterministic manipulation of matter.
  • Opens new avenues for electron microscopy in quantum technology applications.