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Enhancing eCHORD Orientation Mapping by Means of a Derivative Approach.

Gabriel L'Hôte1, Thierry Douillard1, Claire Maurice2

  • 1INSA Lyon, CNRS, Univ Claude Bernard Lyon 1, MATEIS, UMR5510, 7 avenue Jean Capelle, Villeurbanne 69621, France.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|June 25, 2025
PubMed
Summary
This summary is machine-generated.

The electron Channelling ORientation Determination (eCHORD) technique was improved to reduce indexing errors. This enhancement allows for more accurate microstructure characterization using orientation maps.

Keywords:
channeling contrastcrystallographic orientation mappingeCHORDtwin boundaries

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Area of Science:

  • Materials Science
  • Crystallography
  • Microscopy

Background:

  • Electron Channelling ORientation Determination (eCHORD) is a technique for microstructure characterization.
  • Accurate orientation mapping is crucial for understanding material properties.
  • Existing eCHORD methods can suffer from indexation errors.

Purpose of the Study:

  • To minimize indexation errors in the eCHORD technique.
  • To enhance the accuracy of microstructure characterization.
  • To improve the reliability of orientation maps generated by eCHORD.

Main Methods:

  • Modified the core indexing engine of the eCHORD technique.
  • Acquired sequences of backscattered electron images with sample tilting (∼10°-15°).
  • Extracted intensity profiles from image data-cubes and compared them to theoretical profiles.
  • Implemented profile differentiation (using derivatives) to emphasize diffraction peak positions.

Main Results:

  • The use of profile derivatives significantly improved the correspondence between experimental and theoretical data.
  • Minimized indexation errors in orientation maps.
  • Successfully characterized sub-micron twin boundaries in copper interconnects.

Conclusions:

  • The refined eCHORD indexing methodology enhances accurate microstructure characterization.
  • The improved technique provides reliable orientation mapping for materials analysis.
  • Results were validated through comparison with Electron Back Scattered Diffraction (EBSD) data.