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Types of Reversible Electrodes01:24

Types of Reversible Electrodes

For electrode reversibility to be maintained, all the reactants and products involved in the half-reaction must be present at the electrode. There are several types of reversible electrodes (half-cells).In metal-metal-ion electrodes, a metal balances electrochemically with a solution of its own ions. Examples are Cu2+|Cu and Zn2+|Zn. Metals that react with the solvent, like group 1 and most group 2 metals, which react with water, and zinc, which reacts with aqueous acidic solutions, cannot be...

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Correction: Kang et al. Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester. <i>Micromachines</i> 2024, <i>15</i>, 581.

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Multiple Ring Electrode-Based PMUT with Tunable Deflections.

Jan Helmerich1, Manfred Wich1, Annika Hofmann1

  • 1Laboratory for Electrical Instrumentation and Embedded Systems, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, Germany.

Micromachines
|June 27, 2025
PubMed
Summary
This summary is machine-generated.

Piezoelectric micromachined ultrasonic transducers (PMUTs) offer kHz frequencies in a µm scale, overcoming bulk transducer limitations. Their novel ring electrode design allows adjustable sound fields and dual-frequency emission for miniaturized applications.

Keywords:
PMUTPZT annealingadjustable deflectioncharacterization of piezoelectric materialsmultiple electrode designultrasonic transducers

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Area of Science:

  • Micro-ultrasonics
  • Materials science
  • Transducer technology

Background:

  • Traditional piezoelectric bulk transducers are limited by size and frequency for micro-scale applications.
  • Miniaturization of ultrasonic transducers is crucial for emerging fields requiring kHz frequencies and small dimensions.

Purpose of the Study:

  • To present the detailed manufacturing of a novel piezoelectric micromachined ultrasonic transducer (PMUT).
  • To investigate a PMUT design featuring a multiple ring electrode structure for adjustable sound pressure fields.
  • To characterize the performance of the PMUT and its lead zirconate titanate (PZT) piezoelectric material.

Main Methods:

  • Fabrication of a PMUT with a multi-ring electrode configuration.
  • Characterization of lead zirconate titanate (PZT) material properties, including maximum polarization.
  • Measurement of PMUT deflection in air under various electrode excitation conditions.

Main Results:

  • Achieved a maximum PZT polarization of 21.8 µC/cm² at 50 kV/cm.
  • Demonstrated a PMUT displacement of 30.50 nm/V in air with full electrode activation.
  • Showcased adjustable sound deflection and simultaneous dual-frequency emission through distinct electrode excitations.

Conclusions:

  • The developed PMUT design enables precise control over sound pressure fields without additional hardware.
  • The multi-ring electrode structure facilitates adjustable deflection and dual-frequency emission capabilities.
  • These PMUTs show significant potential for miniaturized ultrasonic applications, including implantable devices and micro-communication systems.