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Manfred Wich

2PUBLICATIONS

5CO-AUTHORS

Elemental semiconductorsMicroelectromechanical systems (MEMS)

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Publications (2)

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|May 13, 2026

Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.

|Jun 27, 2025

Multiple Ring Electrode-Based PMUT with Tunable Deflections.

Jan Helmerich, Manfred Wich, Annika Hofmann

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