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Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators
Jianqun Cheng1, Ning Xue1, Bocang Qiu1
1School of Electronics and Communication Engineering, Quanzhou University of Information Engineering, Quanzhou 362000, China.
Micromachines
|June 27, 2025
Summary
Micro-electro-mechanical system (MEMS) electromagnetic actuators are vital for microscale applications, offering precision and control. Recent innovations enhance their performance and expand use in fields like microrobotics and micro-optics.
Area of Science:
- Engineering
- Materials Science
- Physics
Background:
- Micro-electro-mechanical systems (MEMS) electromagnetic actuators are crucial for microscale devices.
- They offer advantages like precision, controllability, high force density, and rapid responsiveness.
Purpose of the Study:
- To systematically review recent developments in MEMS electromagnetic actuators.
- To analyze operating principles, fabrication technologies, performance enhancements, and emerging applications.
- To identify challenges and future research directions.
Main Methods:
- Analysis of Lorentz force and magnetic attraction/repulsion mechanisms.
- Examination of advanced microfabrication, additive manufacturing, and material applications.
- Discussion of smart and adaptive integration strategies for performance enhancement.
Main Results:
- Recent advancements have broadened MEMS electromagnetic actuator capabilities and applications.
- Innovations impact micro-optical systems, microrobotics, precision micromanipulation, and microfluidics.
- Key challenges include miniaturization, integration, power efficiency, and reliability.
Conclusions:
- MEMS electromagnetic actuators are rapidly evolving components with significant potential.
- Further research is needed to address current challenges and unlock future innovations.
- This review serves as a resource for advancing MEMS actuator technology.
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