Resistive Heater Element Based on a Conductive Line in AlN Ceramic Fabricated by Laser Processing

Area of Science:

• Materials Science
• Ceramic Engineering
• Laser Processing

Background:

• Integrated heating elements are crucial for compact electronic devices.
• Developing stable, high-performance ceramic heaters requires advanced fabrication techniques.

Purpose of the Study:

• To demonstrate the feasibility of fabricating integrated resistive heating elements in aluminum nitride (AlN) ceramic.
• To investigate the properties and performance of laser-induced conductive tracts for heating applications.

Main Methods:

• Utilized nanosecond laser processing (1064 nm wavelength) in a vacuum to create conductive areas in AlN ceramic.
• Characterized the material's surface composition, morphology, and electrical properties.
• Tested the thermal stability and operational performance of the fabricated heating elements.

Main Results:

• Laser fluence and pulse count significantly influenced the electrical properties of conductive tracks.
• Resistance values ranged from 17 to 2000 Ohms, depending on processing parameters.
• Conductivity is attributed to ceramic decomposition and aluminum layer formation.
• Heating elements demonstrated stability up to 300°C after annealing and reliable operation up to 90°C.
• Achieved maximum operating temperature of 150°C at 10V.

Conclusions:

• Laser-induced conductive tracts in AlN ceramic are a viable method for creating integrated resistive heaters.
• The fabricated elements offer high stability and reliability for applications in everyday life and research.
• Further research can optimize the design for enhanced performance and broader temperature ranges.