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Ultrathin monolithic bimorph mirror using polarization-inverted lithium niobate wafer
Takato Inoue1, Junya Yoshimizu2, Toma Ueyama2
1Department of Materials Physics, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Aichi, Japan. inoue@mp.pse.nagoya-u.ac.jp.
Scientific Reports
|June 27, 2025
Summary
Researchers developed a novel monolithic bimorph mirror using lithium niobate for enhanced X-ray optics. This advanced deformable mirror offers significantly improved deformation capabilities for X-ray focusing applications.
Area of Science:
- Optics
- Materials Science
- X-ray Technology
Background:
- Deformable mirrors (DMs) are crucial in various optical systems, including recent X-ray applications.
- Piezoelectric bimorph mirrors are commonly used but have limitations in deformation range.
- Existing designs often involve bonding multiple materials, complicating fabrication and limiting performance.
Purpose of the Study:
- To introduce a novel monolithic bimorph mirror design for X-ray optics.
- To leverage the polarization inversion properties of lithium niobate for enhanced mirror performance.
- To overcome the limited deformation capabilities of conventional bimorph mirrors.
Main Methods:
- Proposed a monolithic bimorph mirror design using lithium niobate.
- Utilized the material's polarization inversion properties to enable a thinner mirror structure.
- Experimentally fabricated and tested the mirror's deformation capabilities and precision.
Main Results:
- Achieved a substantial curvature change of 0.1 m⁻¹.
- Demonstrated precise deformation to a target elliptical shape with 1 μm peak-to-valley height and 3 nm precision.
- Enabled significant X-ray beam size variation from 200 nm to 683 μm.
Conclusions:
- The novel monolithic bimorph mirror offers enhanced deformation capabilities compared to conventional designs.
- The mirror's high precision and large deformation range are suitable for advanced X-ray focusing optics.
- This technology holds significant potential for advancing X-ray analytical and imaging applications.

