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Updated: Sep 17, 2025

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Optical anisotropy of pristine and reduced V2O5(010).
Brian Walls1, Oisín Murtagh2, Chris M Smith2
1School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2, Ireland. wallsbc@tcd.ie.
Optical anisotropy in vanadium dioxide (VO2) single crystals was studied using reflectance anisotropy spectroscopy (RAS). Different VO2 phases were identified, enabling real-time monitoring of thin film growth and changes.
Area of Science:
- Materials Science
- Solid State Physics
- Optical Spectroscopy
Background:
- The optical properties of vanadium dioxide (VO2) are highly sensitive to its phase and stoichiometry, making it challenging to study.
- Different V-O phases exhibit distinct electronic and optical characteristics.
- Reflectance anisotropy spectroscopy (RAS) is a powerful non-destructive technique for probing optical anisotropy in real-time.
Purpose of the Study:
- To investigate the optical anisotropy of pristine and reduced single crystalline (010) oriented VO2.
- To identify the spectral features of different VO2 phases formed during reduction and annealing.
- To establish a foundation for using RAS to monitor VO2 thin film growth and modifications.
Main Methods:
- Single crystalline (010) oriented VO2 was subjected to reduction processes.
- Reflectance anisotropy spectroscopy (RAS) was employed for in-situ monitoring.
- Ellipsometry was used to extract axially resolved optical constants.
- Vacuum annealing at various temperatures followed by X-ray Diffraction and RAS analysis.
Main Results:
- Pristine VO2(010) displayed strong optical anisotropy with features beyond its 2.5 eV bandgap.
- Calculated RAS from optical constants showed excellent agreement with experimental data.
- Annealing introduced different VO2 phases ([V2O5], [VO], [V4O7]), each with identifiable spectral features.
- The semiconductor-to-metal phase transition of VO2 at 340 K was observed to influence optical properties.
Conclusions:
- The optical response of ideal single-crystal VO2 was elucidated.
- RAS is effective in identifying different VO2 phases and their spectral characteristics.
- This work provides a framework for real-time monitoring of VO2 thin films using RAS.
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