Low temperature atomic layer deposition of boron nitride using the in situ decomposition of ammonium carbamate

Ana Álvarez-Yenes1,2, Victor O Koroteev1, Maxim R Ryzhikov3

  • 1CIC nanoGUNE BRTA, 20018 Donostia-San Sebastián, Basque Country, Spain. an.alvarez@nanogune.eu.

Chemical Communications (Cambridge, England)
|July 4, 2025
PubMed

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