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Updated: Sep 14, 2025

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
Published on: May 17, 2024
High-Performance Sb2Te3 Thick Films via Diffusion-Induced Structural Tuning for Flexible Thermoelectric Energy
Junhui Su1, Ning Chen1, Zhuoming Xu1
1Shenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, State Key Laboratory of Radio Frequency Heterogeneous Integration, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, Guangdong 518060, China.
High-performance antimony telluride (Sb2Te3) thick films were fabricated for flexible energy harvesting. Optimized thermal diffusion significantly boosted power factor, enabling efficient wearable thermoelectric devices with excellent durability.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Energy Harvesting
Background:
- Antimony telluride (Sb2Te3) is a key p-type thermoelectric material.
- High-performance thick films are crucial for efficient flexible thermoelectric devices.
- Wearable electronics require stable power from energy harvesting.
Purpose of the Study:
- To fabricate high-performance Sb2Te3 thick films for flexible thermoelectric devices.
- To optimize thermal diffusion for enhanced thermoelectric properties.
- To evaluate the performance and durability of flexible thermoelectric devices.
Main Methods:
- Fabrication of 10 μm Sb2Te3 thick films using thermal evaporation and thermal diffusion.
- Optimization of thermal diffusion temperature for Sb2Te3 films.
- Characterization of thermoelectric properties (electrical conductivity, power factor) and device performance (output voltage, power density).
- Assessment of device flexibility and stability through bending tests.
Main Results:
- Achieved a room-temperature power factor of 25.0 μW cm-1 K-2 in optimized 10 μm Sb2Te3 films.
- Developed a flexible planar thermoelectric device with 57 mV output voltage and 8.85 μW peak output power under a 60 °C temperature gradient.
- Demonstrated high output power density of 4.42 mW cm-2.
- Device exhibited excellent mechanical stability with only a 16.7% resistance change after 800 bending cycles at 60% strain.
Conclusions:
- A scalable strategy for enhancing thermoelectric performance of Sb2Te3 thick films was presented.
- Optimized thick films and flexible devices show significant potential for wearable energy harvesting.
- The developed technology advances the practical application of thermoelectric generators in flexible electronics.
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