Ultra-High Sensitivity, Wide-Range Thermometry Based on High-Quality Microscale Diamond Resonators

Area of Science:

• Materials Science
• Physics
• Engineering

Background:

• Next-generation thermometry demands high sensitivity, precision, and micro/nanoscale resolution for diverse applications like bio-calorimetry and quantum science.
• Existing thermocouple, resistive, and optical thermometers face limitations including large size, low resolution, high noise, and narrow temperature ranges.
• Silicon Microelectromechanical system (MEMS) resonators offer potential but struggle with balancing responsivity, temperature resolution, and sensitivity.

Purpose of the Study:

• To develop a novel MEMS thermometry platform overcoming the limitations of current technologies.
• To leverage single-crystal diamond and multi-mode resonance for enhanced thermometry performance.
• To demonstrate ultrahigh temperature sensitivity and resolution at micro/nanoscale levels.

Main Methods:

• Utilized highest crystal quality single-crystal diamond for MEMS cantilever fabrication.
• Employed multi-mode resonance within the MEMS resonator design.
• Integrated diamond MEMS resonators with electrical circuits for sensing.

Main Results:

• Achieved ultra-high sensitivity of approximately 22 nK/√Hz.
• Demonstrated a high temperature resolution of 100 µK.
• Established a wide operational temperature range from 6.5 K to 380 K.

Conclusions:

• Diamond MEMS resonators offer unparalleled performance for next-generation thermometry.
• This technology provides a transformative platform for ultrahigh-sensitivity, high-resolution temperature sensing in micro/nanoscale applications.
• The developed diamond MEMS thermometry overcomes critical trade-offs in current sensing technologies.