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A Comparative Study on Synthesizing SiC via Carbonization of Si (001) and Si (111) Substrates by Chemical Vapor

Teodor Milenov1, Ivalina Avramova2, Vladimir Mehandziev3

  • 1"Acad. E. Djakov" Institute of Electronics, Bulgarian Academy of Sciences, 1784 Sofia, Bulgaria.

Materials (Basel, Switzerland)
|July 30, 2025
PubMed

Keywords:
X-ray photoelectron spectroscopychemical vapor depositionpowder X-ray diffractionsilicon carbidetransmission electron microscopy

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