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Leveling Method of Working Platform Based on PZT Electromechanical Coupling Effect

Aiqun Xu1, Jianhui Yuan1, Jinxuan Gao1

  • 1School of Intelligent Manufacturing and Energy Engineering, Zhejiang University of Science and Technology, 318 Liu He Road, Hangzhou 310023, China.

Micromachines
|July 30, 2025
PubMed

Keywords:
electromechanical coupling effectlevelingpiezoelectric material

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