Understanding the Nanoindentation Edge Effect of Single-Crystal Silicon Using Molecular Dynamics Simulations

Chao Long1, Ruihan Li2, Pengyue Zhao1

  • 1Center of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, China.

Micromachines
|July 30, 2025
PubMed
Summary

This study reveals how indentation position affects edge effects in single-crystal silicon. Closer indentations to the edge cause more particle extrusion and wider surface collapse, impacting stress and phase transitions.

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