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Related Concept Videos

Atomic Emission Spectroscopy: Instrumentation01:22

Atomic Emission Spectroscopy: Instrumentation

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The instrumentation of atomic emission spectrometry (AES) involves various components, including atomization devices that convert samples into gas-phase atoms and ions. There are two main types of atomization devices: continuous and discrete atomizers.  Continuous atomizers, like plasmas and flames, introduce samples in a constant stream, while discrete atomizers inject individual samples using syringes or autosamplers. The most common discrete atomizer is the electrothermal atomizer.
596
Atomic Emission Spectroscopy: Lab01:29

Atomic Emission Spectroscopy: Lab

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AES is a powerful analytical technique, especially effective when used with plasma sources, producing abundant spectra in characteristic emission lines. The Inductively Coupled Plasma (ICP), in particular, yields superior quantitative analytical data due to its high stability, low noise, low background, and minimal interferences under optimal experimental conditions. However, newer air-operated microwave sources are emerging as promising alternatives that could be more cost-effective than...
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Atomic Spectroscopy: Absorption, Emission, and Fluorescence01:23

Atomic Spectroscopy: Absorption, Emission, and Fluorescence

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Atomic spectroscopy is a vital tool in elemental analysis, both qualitatively and quantitatively. It can be broadly divided into optical spectroscopy, mass spectroscopy, and X-ray spectroscopy methods. The optical spectroscopic methods are atomic absorption spectroscopy (AAS), atomic emission spectroscopy (AES), and atomic fluorescence spectroscopy (AFS). The first step in all three methods is atomization, where the solid, liquid, or solution-phase samples are converted into gas-phase atoms and...
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Atomic Emission Spectroscopy: Overview01:20

Atomic Emission Spectroscopy: Overview

2.6K
Atomic emission spectroscopy (AES) is an analytical technique used to determine the elemental composition of a sample by analyzing the light emitted from excited atoms. In AES, atoms in a sample are excited to higher energy levels by thermal energy from high-temperature sources, such as plasma, arcs, or sparks. When these excited atoms return to lower energy states, they emit light at specific wavelengths characteristic of each element. The resulting atomic emission spectrum, which consists of...
2.6K
Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation01:26

Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation

296
Inductively coupled plasma (ICP) is the common plasma source used in atomic emission spectroscopy (AES), a technique that detects and analyzes various elements in a sample. This method is often called inductively coupled plasma atomic emission spectroscopy (ICP-AES).
There are three main types of inductively coupled plasma atomic emission spectroscopy  (ICP-AES) instruments: sequential, simultaneous multichannel, and Fourier transform instruments, with the latter being less commonly used....
296
Atomic Absorption Spectroscopy: Lab01:21

Atomic Absorption Spectroscopy: Lab

557
For AAS measurements, samples must be introduced as clear solutions, often requiring extensive preliminary treatment to dissolve materials like soils, animal tissues, and minerals. Common methods for sample preparation include treatment with hot mineral acids, wet ashing, combustion in closed containers, high-temperature ashing, or fusion with reagents.
 Solutions containing organic solvents, such as low-molecular-mass alcohols, esters, or ketones, enhance absorbances by increasing...
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Updated: Sep 12, 2025

Emission Spectroscopic Boundary Layer Investigation during Ablative Material Testing in Plasmatron
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Fast, In Situ Gas Analysis during Atomic Layer Deposition through Optical Emission Spectroscopy and Non-Negative

Andreas Werbrouck1, Philippe F Smet1, Dirk Poelman1

  • 1Ghent University, Department of Solid State Sciences, Krijgslaan 281 S1, 9000 Ghent, Belgium.

ACS Sensors
|August 4, 2025
PubMed
Summary
This summary is machine-generated.

Optical emission spectroscopy with non-negative matrix factorization (NMF) effectively characterizes atomic layer deposition (ALD) chemistry. This method identifies reaction products and addresses spurious signals for accurate in situ process monitoring.

Keywords:
atomic layer depositiondata-driven discoveryin situnon-negative matrix factorizationoptical emission spectroscopy

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Area of Science:

  • Materials Science
  • Chemical Engineering
  • Spectroscopy

Background:

  • In situ characterization of Atomic Layer Deposition (ALD) is crucial for understanding reaction mechanisms and enabling industrial process control.
  • Optical emission from cold cathode discharges has been proposed for nonintrusive monitoring of gas species in ALD reactors.

Purpose of the Study:

  • To critically evaluate the use of optical emission spectroscopy for in situ ALD process characterization.
  • To assess the efficacy of non-negative matrix factorization (NMF) for analyzing complex spectroscopic data from ALD.

Main Methods:

  • Characterization of trimethylaluminum (TMA)-H2O ALD chemistry using optical emission spectroscopy.
  • Application of non-negative matrix factorization (NMF) for holistic analysis of spectral and time-resolved emission data.

Main Results:

  • A naive analysis of emission line intensities was insufficient for identifying reaction products.
  • NMF successfully identified precursor fragments and reaction products, confirming the TMA-H2O ALD mechanism yielding methane (CH4).
  • NMF analysis revealed spurious hydrogen (H) signals generated by the discharge, which could lead to misinterpretation of H emission lines.

Conclusions:

  • Continuous optical emission spectroscopy, when analyzed with NMF, provides a powerful tool for ALD process characterization.
  • NMF enables the unraveling and visualization of complex spectroscopic data, improving the accuracy of in situ monitoring.
  • The study highlights the importance of advanced data analysis techniques to overcome limitations in optical emission-based ALD diagnostics.