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Related Experiment Video

Updated: Sep 12, 2025

Quantification of Hydrogen Concentrations in Surface and Interface Layers and Bulk Materials through Depth Profiling with Nuclear Reaction Analysis
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High-Performance Hydrogen Sensors for ppb-Level Detection at Room Temperature Using Pd Nanoparticle-Coated Si

Xianwu Xu1, Mengxin Liu1, Yuanping Zhang1

  • 1Tribology Research Institute, School of Mechanical Engineering, Southwest Jiaotong University, Chengdu 610031, China.

ACS Sensors
|August 5, 2025
PubMed
Summary

This study presents a novel hydrogen (H2) sensor using palladium nanoparticles on silicon nanoforests. It achieves highly sensitive, room-temperature detection of H2 at parts-per-billion levels for safety and energy applications.

Keywords:
hydrogen sensingpalladium nanoparticlesreactive ion etchingsilicon nanostructuresultralow detection limit

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Chemical Sensing

Background:

  • Developing hydrogen (H2) sensors with high sensitivity and room-temperature operation is crucial for industrial safety and H2 energy technologies.
  • Existing sensors face challenges in room-temperature functionality, selectivity, and integration despite achieving parts-per-billion (ppb) detection limits.

Purpose of the Study:

  • To report a high-performance H2 sensor with ppb-level detection limits at room temperature.
  • To demonstrate exceptional sensitivity, reliability, and selectivity for H2 sensing applications.

Main Methods:

  • Fabrication of a sensor using palladium nanoparticles (Pd NPs) functionalized silicon (Si) nanoforest structures.
  • Utilizing the high surface-to-volume ratio (H-SVR) of Si nanoforests for enhanced gas adsorption.
  • Characterization of sensor performance including response, detection limit, reproducibility, and selectivity.

Main Results:

  • The optimized sensor achieved a response of 1685% to 1% H2 at room temperature.
  • An ultralow detection limit of 50 ppb was demonstrated.
  • Excellent batch-to-batch reproducibility, strong selectivity, and high-humidity adaptability were observed.

Conclusions:

  • The sensor's superior performance is attributed to synergistic effects of Pd catalysis, high surface area adsorption, and Pd/Si Schottky junction modulation.
  • This H2 sensor shows significant potential for next-generation sensing platforms in industrial safety, environmental monitoring, and the H2 economy.