Efficient reconstruction and calibration strategy for a uniaxial MEMS-based 3D reconstruction system

Area of Science:

• Robotics and Automation
• Optical Engineering
• Micro-electro-mechanical Systems (MEMS)

Background:

• Micro-electro-mechanical systems (MEMS) offer high frequency and small size advantages for 3D measurement.
• Existing MEMS-based 3D reconstruction and calibration methods are often complex and time-consuming.

Purpose of the Study:

• To propose an efficient and simplified method for 3D reconstruction and calibration of uniaxial MEMS-based measurement systems.
• To reduce the complexity of calibration processes in MEMS 3D measurement.

Main Methods:

• Establishment of a micro-electro-mechanical system coordinate system (MCS) based on the MEMS mirror's mathematical model.
• Recovery of 3D points using a simple constraint within the MCS in a triangulation-like form.
• Development of a simplified calibration method for the MCS requiring only a single calibration position.

Main Results:

• Successful establishment of the MEMS coordinate system (MCS) and recovery of 3D points.
• A significantly simplified calibration process for the MCS, requiring only one position.
• Experimental verification of the method's feasibility and effectiveness through quantitative and comparative analyses.

Conclusions:

• The proposed method offers an efficient and simplified approach to 3D reconstruction and calibration for MEMS-based systems.
• The simplified calibration procedure drastically reduces the effort required for MEMS 3D measurement system setup.
• This work contributes to making MEMS-based 3D measurement technologies more practical and widely applicable.