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High-temperature-resistant gas pressure sensor based on an all-silica Fabry-Perot interferometer.
Applied Optics
|August 12, 2025
Summary
A novel all-silica Fabry-Perot interferometer sensor accurately measures gas pressure up to 14 MPa. This high-temperature-resistant sensor operates reliably in extreme environments up to 655°C.
Area of Science:
- Optoelectronics
- Sensor Technology
- Materials Science
Background:
- High-temperature environments pose significant challenges for conventional gas pressure sensors.
- Accurate pressure monitoring is critical for safety and efficiency in various industrial applications.
Purpose of the Study:
- To develop and demonstrate a high-temperature-resistant gas pressure sensor.
- To investigate the performance of an all-silica Fabry-Perot interferometer (FPI) for pressure sensing in extreme thermal conditions.
Main Methods:
- Fabrication of an all-silica FPI structure using CO2 laser welding.
- Integration of a femtosecond laser-inscribed fiber Bragg grating for temperature compensation.
- Analysis of FPI cavity length changes correlated with gas pressure.
Main Results:
- The sensor demonstrated good linearity over a 0-14 MPa pressure range with a sensitivity of 58 nm/MPa.
- Achieved a high accuracy with an error of 0.8% full scale (F.S.).
- Stable gas pressure measurement (0-3.2 MPa) was confirmed in environments ranging from 25°C to 655°C.
Conclusions:
- The proposed all-silica FPI sensor offers a robust solution for high-temperature gas pressure measurement.
- Its compact design and stable performance indicate significant potential for applications in safety monitoring, energy, and geological exploration.

